The ultimate in compact laser micromachining systems - looks small but acts big!

Cover - Safety Cover

Interlocked safety cover provides protection from direct and reflected laser light

Image - TTL Viewing

Embedded through-the-lens (TTL) image of the process area. Select areas of interest-, optimise contrast-, zoom-, measure using video cursor-, print

Software - ProcessPower Software

ProcessPower for PM control software provides synchronised control over part motion, process motif and laser function, including handy sub-routines and import of industry standard files

Vision - Part Lighting and Viewing

Through-the-lens (TTL) vision system with integrated and adjustable coaxial part illumination

Laser - ATLEX 300i short Pulse excimer

The ProMaster is a perfectly matched add-on unit to the ATLEX 300i short pulse excimer laser, with the highest beam brightness of its class, superb beam quality and long gas lifetime

Mask - Mask Options

PC driven mask selector with 32 motifs on an interchangeable plate. Optional RVA aperture allows an unlimited number of user-defined 'virtual motifs' to be created and stored in PC memory for subsequent recall

Energy - Energy Controller

Select the appropriate processing conditions for polymer ablation, metal stripping, direct writing, etc., from 0.5-5 J/cm

Stability - Natural Granite Base

The natural granite base offers superb stability for precision micromachining

Motion - Part motion assembly

Part motion over 100 x 100 mm with 1

resolution and digital position readout. ProcessPower for PM software allows all types of movement synchronised to laser firing

Focus - Precision Focus

Smooth manual focus control over 0-10 mm with WYSIWYG feature. Ensures that when the CCTV is in focus the UV projection is also automatically in focus

Lens - UV Projection Lens

Three-element confocal UV projection lens with 1.5

resolution, specially designed for UV mask projection applications

Theta - Rotation Stage

Manual rotation stage with full 360

travel, aids alignment of parts to the X,Y axes

Part - Vacuum Chuck

Standard part holder is an 80 mm vacuum chuck for secure holding of all flat parts

Shield - Coaxial Gas Nozzle

A coaxial gas nozzle provides He shield gas for debris-free processing of polymers, and efficient removal of ablation products

UV Micromachining Applications

• Selective polymer removal
• Micro-hole drilling
• Thin metal film patterning
• Micro-milling
• Micro-etching
• 3D structure generation
• OLEDs
• Microfluidics
• Sensors